Sr. Metrology Engineer, Terafab

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Sr. Metrology Engineer, Terafab

| Job Category | Terafab | | Location | Austin, Texas | | Req. ID | 269685 | | Job Type | Full-time |

What to Expect

We are building Terafab, a vertically integrated semiconductor factory at an unprecedented scale. The facility houses logic, memory, packaging, test, and lithography mask production under one roof, optimized for rapid iteration and maximum compute density per square foot.

As a Senior Metrology Engineer, you’ll design and deploy the precision measurement systems that define process control, yield, and device performance across our advanced fabrication line. From characterizing nanoscale features in EUV lithography to enabling real-time feedback loops for closed-loop process control, your work will directly shape the accuracy, reliability, and scalability of Tesla’s custom silicon. You’ll pioneer metrology strategies for new materials, architectures, and nodes—turning data into actionable insight, and innovation into reality. This is not just about measuring the world—it’s about building the future, one atom at a time.

What You’ll Do

• Own the inline metrology strategy across all critical layers: CD, overlay, film thickness, defect density, and electrical continuity

• Develop, qualify, and optimize metrology processes (e.g., CD-SEM, OCD, ellipsometry, X-ray, scatterometry) for critical process steps (e.g., lithography, etch, deposition, CMP)

• Spearhead the qualification of new metrology tools (e.g., CD-SEM, multi-wavelength ellipsometers, in-line metrology systems) during fab setup and equipment installation (EPI)

• Collaborate with equipment vendors and process engineers to resolve tool performance issues and implement corrective actions

• Collect, analyze, and interpret metrology data using statistical tools (e.g., SPC, control charts, multivariate analysis) to detect process drifts, tool wear, or recipe inconsistencies

• Correlate metrology results with process and test data to identify root causes of non-conformance and yield loss

• Lead physical failure analysis (PFA) including FIB/SEM cross-sections, EBAC, and TEM sample preparation

What You’ll Bring

• Degree in Electrical Engineering, Physics, Materials Science, or equivalent experience

• 5+ years of or metrology engineering experience in a leading-edge semiconductor fab

• Experience with with multiple metrology platforms including CD-SEM, OCD (Optical Critical Dimension), ellipsometry, scatterometry, X-ray, and in-line metrology systems (e.g., KLA, Nikon, ASML, Hitachi, Bruker)

• Experience driving closed-loop process control via metrology feedback (e.g., APC, MES integration)

• Proficiency in Python, MATLAB, or R for data analysis, automation, and visualization

• Familiarity with machine learning techniques for defect classification, prediction modeling, or metrology data enhancement (e.g., super-resolution, noise reduction)

• Experience with equipment qualification (IQ/OQ/PQ) and statistical process control (SPC)

• Tesla is an Equal Opportunity employer. All qualified applicants will receive consideration for employment without regard to any factor, including veteran status and disability status, protected by applicable federal, state or local laws.

• Tesla is also committed to working with and providing reasonable accommodations to individuals with disabilities. Please let your recruiter know if you need an accommodation at any point during the interview process.

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